Review of deep ultraviolet photodetector based on gallium oxide

Qin Yuan^{1, 3}, Long Shibing^{2, 3, †}, Dong Hang^{1, 3}, He Qiming¹, Jian Guangzhong^{1, 3}, Zhang Ying^{1, 3}, Hou Xiaohu², Tan Pengju², Zhang Zhongfang², Lv Hangbing^{1, 3}, Liu Qi^{1, 3}, Liu Ming^{1, 3}

(a) XRD patterns and three-dimensional AFM surface images of the gallium oxide films deposited by (b) plasma-assisted MBE and (c) magnetron sputtering. (d) Normalized XPS O 1s core-level spectra of the gallium oxide films deposited by magnetron sputtering (red) and plasma-assisted MBE (blue), respectively.^[11]