Review of deep ultraviolet photodetector based on gallium oxide

Qin Yuan^{1, 3}, Long Shibing^{2, 3, †}, Dong Hang^{1, 3}, He Qiming¹, Jian Guangzhong^{1, 3}, Zhang Ying^{1, 3}, Hou Xiaohu², Tan Pengju², Zhang Zhongfang², Lv Hangbing^{1, 3}, Liu Qi^{1, 3}, Liu Ming^{1, 3}

(a) Top view and (b) cross-sectional schematics of the Ti/Au/Ga₂O₃ MSM Ga₂O₃ photodetector. (c) HRTEM image of Ga₂O₃ grown on bulk Ga₂O₃ substrate. (d) XRD curves for Ga₂O₃ device samples on sapphire and bulk. AFM images of (e) Ga₂O₃ grown on sapphire and (f) bulk Ga₂O₃.^[21]