Review of deep ultraviolet photodetector based on gallium oxide

Qin Yuan^{1, 3}, Long Shibing^{2, 3, †}, Dong Hang^{1, 3}, He Qiming¹, Jian Guangzhong^{1, 3}, Zhang Ying^{1, 3}, Hou Xiaohu², Tan Pengju², Zhang Zhongfang², Lv Hangbing^{1, 3}, Liu Qi^{1, 3}, Liu Ming^{1, 3}

(a) The image of photodetectors arrays. (b) Schematic diagram of the photodetectors arrays. (c) The microstructure image of the fabricated devices. (d) Photograph of the photodetectors arrays packaged in ceramic packages.^[32]