Standing-wave spectrometry in silicon nano-waveguides using reflection-based near-field scanning optical microscopy<xref rid="cpb_28_1_010702fn1" ref-type="fn">*</xref><fn id="cpb_28_1_010702fn1"><label>*</label><p>Project supported by National Key R&D Program of China (Grant No. 2017YFA0303800), National Natural Science Foundation of China (Grant No. 61575218), and Defense Industrial Technology Development Program, China (Grant No. JCKY201601C006).</p></fn>

Standing-wave spectrometry in silicon nano-waveguides using reflection-based near-field scanning optical microscopy**

Project supported by National Key R&D Program of China (Grant No. 2017YFA0303800), National Natural Science Foundation of China (Grant No. 61575218), and Defense Industrial Technology Development Program, China (Grant No. JCKY201601C006).

Sun Yi-Zhi^{1, 2}, Ding Wei^{2, ‡}, Wang Bin-Bin³, Salas-Montiel Rafael³, Blaize Sylvain³, Bachelot Renaud³, Fan Zhong-Wei⁴, Feng Li-Shuang^{1, †}

(a) Schematic of a guided wave being Mie–Rayleigh scattered by an AFM probe. The blue and the red arrows represent the reflection and extinction of light, respectively. (b) Different components of the overall modulated signal beam in the –y direction. The orange arrow represents the CW reference beam. l and L depict the positions of the probe and the back facet, respectively. The dashed lines indicate the light intensity modulations imposed by the vibrated AFM probe. (c) Experimental setup of a reflection-based NSOM. Inset: the light coupled back to the lensed fiber consists of the CW reference beam and the modulated/unmodulated signal beam.