Suppression of indium-composition fluctuations in InGaN epitaxial layers by periodically-pulsed mixture of N2 and H2 carrier gas Project supported by the Science and Technology Major Project of Guangdong Province, China (Grant No. 2015B010112001) and the Natural Science Foundation of Guangdong Province, China (Grant No. 2015A030312011). |
(color online) (a) PL spectra, (b) AFM image (10 μm × 10 μm) of the 10-s sample, and (c) control sample which is deposited under N2 carrier gas. |