Suppression of indium-composition fluctuations in InGaN epitaxial layers by periodically-pulsed mixture of N2 and H2 carrier gas Project supported by the Science and Technology Major Project of Guangdong Province, China (Grant No. 2015B010112001) and the Natural Science Foundation of Guangdong Province, China (Grant No. 2015A030312011). |
(color online) (105) RSMs of samples with duration times of (a) 0 s, (b) 5 s, and (c) 10 s. Relaxed line and strained line are plotted. |