Review of improved spectral response of ultraviolet photodetectors by surface plasmon<xref rid="cpb_27_12_126101_fn1" ref-type="fn">*</xref><fn id="cpb_27_12_126101_fn1"><label>*</label> <p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFB0400904), the National Natural Science Foundation for Distinguished Young Scholars, China (Grant No. 61725403), the National Natural Science Foundation of China (Grant Nos. 61574142, 61322406, 61704171, and 11705206), the Key Program of International Partnership Program of the Chinese Academy of Sciences (Grant No. 181722KYSB20160015), the Special Project for Inter-government Collaboration of State Key Research and Development Program, China (Grant No. 2016YFE0118400), the Science and Technology Service Network Initiative of the Chinese Academy of Sciences, the Jilin Provincial Science & Technology Department, China (Grant No. 20180201026GX), the Interdisciplinary Innovation Team of the Chinese Academy of Sciences, and the Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. 2015171).</p></fn>

Review of improved spectral response of ultraviolet photodetectors by surface plasmon**

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFB0400904), the National Natural Science Foundation for Distinguished Young Scholars, China (Grant No. 61725403), the National Natural Science Foundation of China (Grant Nos. 61574142, 61322406, 61704171, and 11705206), the Key Program of International Partnership Program of the Chinese Academy of Sciences (Grant No. 181722KYSB20160015), the Special Project for Inter-government Collaboration of State Key Research and Development Program, China (Grant No. 2016YFE0118400), the Science and Technology Service Network Initiative of the Chinese Academy of Sciences, the Jilin Provincial Science & Technology Department, China (Grant No. 20180201026GX), the Interdisciplinary Innovation Team of the Chinese Academy of Sciences, and the Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. 2015171).

Wu You^{1, 2}, Sun Xiao-Juan^{1, †}, Jia Yu-Ping¹, Li Da-Bing^{1, ‡}

(color online) (a) Dark current and photocurrent characteristic curves of the AlGaN-based MSM PDs with and without Al nanoparticles. (b) Spectral response of AlGaN-based MSM detectors with and without Al nanoparticles under 20-V applied bias. The inset shows the schematic illustration of the device with size-controlled and well-ordered Al nanoparticle arrays.^[31] All the above were reproduced with copyright permission.