Review of improved spectral response of ultraviolet photodetectors by surface plasmon<xref rid="cpb_27_12_126101_fn1" ref-type="fn">*</xref><fn id="cpb_27_12_126101_fn1"><label>*</label> <p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFB0400904), the National Natural Science Foundation for Distinguished Young Scholars, China (Grant No. 61725403), the National Natural Science Foundation of China (Grant Nos. 61574142, 61322406, 61704171, and 11705206), the Key Program of International Partnership Program of the Chinese Academy of Sciences (Grant No. 181722KYSB20160015), the Special Project for Inter-government Collaboration of State Key Research and Development Program, China (Grant No. 2016YFE0118400), the Science and Technology Service Network Initiative of the Chinese Academy of Sciences, the Jilin Provincial Science & Technology Department, China (Grant No. 20180201026GX), the Interdisciplinary Innovation Team of the Chinese Academy of Sciences, and the Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. 2015171).</p></fn>

Review of improved spectral response of ultraviolet photodetectors by surface plasmon**

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFB0400904), the National Natural Science Foundation for Distinguished Young Scholars, China (Grant No. 61725403), the National Natural Science Foundation of China (Grant Nos. 61574142, 61322406, 61704171, and 11705206), the Key Program of International Partnership Program of the Chinese Academy of Sciences (Grant No. 181722KYSB20160015), the Special Project for Inter-government Collaboration of State Key Research and Development Program, China (Grant No. 2016YFE0118400), the Science and Technology Service Network Initiative of the Chinese Academy of Sciences, the Jilin Provincial Science & Technology Department, China (Grant No. 20180201026GX), the Interdisciplinary Innovation Team of the Chinese Academy of Sciences, and the Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. 2015171).

Wu You^{1, 2}, Sun Xiao-Juan^{1, †}, Jia Yu-Ping¹, Li Da-Bing^{1, ‡}

(color online) (a) Schematic illustration of Al NPs on AlGaN-based deep-UV detector. (b)–(d) SEM images of Al NPs with diameters of 20 nm, 40 nm, and 60 nm, respectively, deposited on the detectors, (e)–(f) two-dimensional (2D) morphology and corresponding cross-sectional profile of the Al NPs.^[50] All the above were reproduced with copyright permission.