Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method
Lu Xiaoyong1, 2, Zhang Xiaozhang1, †, Zhang Zhizhong2
       

(color online) The z-direction atomic flux along the substrate. Lines DSMC, crosses BGK, circles S-model; black Kns = 0.10, blue Kns = 1.00, red Kns = 10.0.