Numerical simulation of metal evaporation based on the kinetic model equation and the direct simulation Monte Carlo method

Lu Xiaoyong^{1, 2}, Zhang Xiaozhang^{1, †}, Zhang Zhizhong²

(color online) The z-direction atomic flux along the substrate. Lines DSMC, crosses BGK, circles S-model; black K_ns = 0.10, blue K_ns = 1.00, red K_ns = 10.0.