Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software. |
(color online) Metastable density profiles when the gas flow is not included (a) and at 200 m/s inlet velocity, at the discharge condition of 50 mTorr and 200 W. |
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