Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows<xref rid="cpb_27_12_124701fn1" ref-type="fn">*</xref><fn id="cpb_27_12_124701fn1"><label>*</label> <p>Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.</p></fn>

Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows**

Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.

Zhao Shu-Xia^†, Feng Zhao

(color online) (a) Mesh set I is used for the spatial discretization of ICP chamber in the simulations. (b) Mesh set II holds fine mesh in the plasma region as compared to mesh set I. It is used to test the dependence of simulation results on mesh size, i.e., numerical errors. The tests show that the absolute relative differences of electron densities and temperatures that are calculated by using mesh sets I and II, respectively, are about 0.05%. The difference is tiny, and the simulation results are hence independent of the mesh size.