Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows*

Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.
Zhao Shu-Xia †, Feng Zhao
       

(color online) Calculated gas mixture density profiles with wide (a) and fine (b) resolution legends, at the discharge condition of 20 mTorr, 200 W, and 2000 sccm. In Fig. 11(b), a special way of demonstrating this fine data structure around the chamber periphery is used, i.e., a small range of data, 8.32 × 10−5 ∼ 8.4 × 10−5, is used to define the color bar while a wide range of actual data, 4.3 × 10−5 ∼ 8.4 × 10−5, is represented by this color bar.