Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows<xref rid="cpb_27_12_124701fn1" ref-type="fn">*</xref><fn id="cpb_27_12_124701fn1"><label>*</label> <p>Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.</p></fn>

Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows**

Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.

Zhao Shu-Xia^†, Feng Zhao

(color online) Peaked values of electron density and temperature profiles versus the gas flow rate at 20 mTorr and 200 W.