(color online) NWRIM images of Bluray disk, integrated circuit, and “ZJU” pattern. (a) Conventional and (b) NWRIM images of Blu-ray disk. Boxed regions are magnified (top insets). (c) Conventional and (d) NWRIM images of integrated chip. Boxed regions are magnified (left bottom insets) and (e) SEM and (f) cross-sectional intensity distribution along the blue arrows. NWRIM and conventional illumination are denoted as NW and Conv., respectively. (g) SEM and (h) NWRIM images of arbitrary “ZJU” pattern etched on Al₂O₃ film. NA = 0.85. Reproduced with permission from Ref. [50].