Silicon nanophotonics for on-chip light manipulation<xref rid="cpb_27_10_104208fn1" ref-type="fn">*</xref><fn id="cpb_27_10_104208fn1"><label>*</label><p>Project supported by the National Natural Science Foundation for Distinguished Young Scholars (Grant No. 61725503), Zhejiang Provincial Natural Science Foundation (Grant No. Z18F050002), the National Natural Science Foundation of China (Grant Nos. 61431166001 and 11861121002); and the National Major Research and Development Program of China (Grant No. 2016YFB0402502).</p></fn>

Silicon nanophotonics for on-chip light manipulation**

Project supported by the National Natural Science Foundation for Distinguished Young Scholars (Grant No. 61725503), Zhejiang Provincial Natural Science Foundation (Grant No. Z18F050002), the National Natural Science Foundation of China (Grant Nos. 61431166001 and 11861121002); and the National Major Research and Development Program of China (Grant No. 2016YFB0402502).

Guo Jingshu, Dai Daoxin^†

(color online) Structures of hybrid silicon integrated optical modulators: (a) Si–LiNbO₃,^[140] (b) dielectric slot waveguide-type Si-polymer modulator,^[142] (c) MIMWG-type Si-polymer modulator,^[120] (d) Si–III–V material,^[144] and (e) Si-graphene.^[149]