Fabrication of Al air-bridge on coplanar waveguide<xref rid="cpb_27_10_100310_fn1" ref-type="fn">*</xref><fn id="cpb_27_10_100310_fn1"><label>*</label><p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).</p></fn>

Fabrication of Al air-bridge on coplanar waveguide**

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).

Jin Zhen-Chuan, Wu Hai-Teng, Yu Hai-Feng^†, Yu Yang

(color online) (a)–(d) Procedure for superconducting airbridge fabrication. Colored in yellow, red, and white in the illustrations are aluminum, resist, and Nb, respectively. The preparing for CPW transmission line is omitted. (a) Pattern and reflow to make the upholder. (b) Deposition of aluminum. (c) Introducing bridge-like resist to define the bridge length and width. (d) Finished air-bridges over a CPW transmission line after wet etching and oxygen plasma.