Fabrication of Al air-bridge on coplanar waveguide<xref rid="cpb_27_10_100310_fn1" ref-type="fn">*</xref><fn id="cpb_27_10_100310_fn1"><label>*</label><p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).</p></fn>

Fabrication of Al air-bridge on coplanar waveguide**

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301802) and the National Natural Science Foundation of China (Grant Nos. 11474152, 11274156, 11504165, and 61521001).

Jin Zhen-Chuan, Wu Hai-Teng, Yu Hai-Feng^†, Yu Yang

(color online) Cross section view of an air-bridge crossing a CPW. Colored in blue, yellow, and grey are Si substrate, Nb film, and air-bridge.