Key technologies for dual high-k and dual metal gate integration Project supported by the National High Technology Research and Development Program of China (Grant No. 2015AA010601). |
Separating of high-k and metal gate for n/pMOS. (a) TaN/Mo/HfSiAlON deposition after selectively removing TaN/HfSiON, (b) TaN/Mo/HfSiAlON selectively removing, (c) a-Si hardmask removing, and (d) Poly-Si capping. |