Structural and electrical properties of carbon-ion-implanted ultrananocrystalline diamond films*

Project supported by the National Natural Science Foundation of China (Grant Nos. 50972129 and 50602039), the International Science Technology Cooperation Program of China (Grant No. 2014DFR51160), the National Key Research and Development Program of China (Grant No. 2016YFE0133200), European Unio’s Horizon 2020 Research and Innovation Staff Exchange (RISE) Scheme (Grant No. 734578), One Belt and One Road International Cooperation Project from the Key Research and Development Program of Zhejiang Province, China (Grant No. 2018C04021), and Xinmiao Talents Program of Zhejiang Province, China (Grant No. 2017R403078).

Xu Hui1, Liu Jian-Jun1, Ye Hai-Tao2, †, Coathup D J2, Khomich A V3, 4, Hu Xiao-Jun1, ‡
       

(color online) Low-magnification TEM images and SAED patterns (insets) of the (a) as-deposited sample and samples (b) C12900 and (c) C121000. (d) High-magnification TEM image of sample C12900 with FT diffractograms corresponding to the entire image (FT0), area 1 (FT1), and area 2 (FT2) (inset). (d1), (d2) Inversely transformed structures of amorphous-carbon and diamond diffraction points in area 1 and area 2, respectively. (e) High-magnification TEM image of sample C12900 with FT diffractograms corresponding to the entire image (FT0), area 1 (FT1), and area 2 (FT2), shown in the inset. (e1), (e2) Inversely transformed structures of the graphite ring and diamond diffraction points in area 1 and area 2, respectively. (f) High-magnification TEM image of sample C121000 with FT diffractograms corresponding to the entire image (FT0), area 1 (FT1), and area 2 (FT2) (inset). (f1), (f2) Inversely transformed structures of the graphite ring and diamond diffraction points in area 1 and area 2, respectively.