Etching-assisted femtosecond laser microfabrication<xref rid="cpb_27_9_094212fn1" ref-type="fn">*</xref><fn id="cpb_27_9_094212fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant No. 51501070).</p></fn>

Etching-assisted femtosecond laser microfabrication**

Project supported by the National Natural Science Foundation of China (Grant No. 51501070).

Liu Monan¹, Li Mu-Tian², Yang Han^{2, †}, Sun Hong-Bo²

(color online) Microfabrication of artificial compound eyes through molding. (a)–(d) Schematic of the fabrication process, including (a) point-by-point femtosecond-laser seeding along the crater mold, (b) wet etching of concave microlens arrays, (c) PDMS injection and solidification, and (d) mold peeling off and formation of the compound eye structure. (e) and (f) SEM images of the artificial compound eye structure at a tilting angle of 45°.^[34]