Etching-assisted femtosecond laser microfabrication<xref rid="cpb_27_9_094212fn1" ref-type="fn">*</xref><fn id="cpb_27_9_094212fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant No. 51501070).</p></fn>

Etching-assisted femtosecond laser microfabrication**

Project supported by the National Natural Science Foundation of China (Grant No. 51501070).

Liu Monan¹, Li Mu-Tian², Yang Han^{2, †}, Sun Hong-Bo²

Microfabrication of artificial compound eyes through double thermal molding. (a) Schematic of the fabrication process consisting of a combination of FsLMF, chemical etching, and thermal molding. (b) Top-view SEM image of the fabricated compound eyes; the inset shows the densely packed local convex microlenses. (c) Side-view SEM image of the macroscopic profile of the artificial compound eyes; the inset shows the microscopic convex profile of the microlenses.^[26]