(color online) 3D FsLMF through single-pulse-enabled laser seeding. (a) Schematic of the fabrication system with an SLM to realize single-pulse laser seeding. (b) Schematic of a 3 × 3 seed array obtained from modulated multi-beams with varied powers, where the circle size represents the corresponding power. (c) Confocal microscopic image and (d) AFM cross-section characterizations of a fabricated 3 × 3 concave microlens array. (e) Confocal microscopic image of a hexagonally arranged densely packed concave microlens array; the inset shows its schematic seed pattern.^[31]