(color online) Dry-etching-assisted 3D FsLMF. (a) Schematic of the fabrication process, including a point-by-point laser-seeding and dry-etching as two main steps. (b) Schematic of the profile evolution of a local laser-modified region during the dry etching. (c) Dependences of the diameter and height on the etching time. (d) and (e) High compatibility of the dry-etching-assisted 3D FsLMF: scanning-electron-microscopy (SEM) images of (d) a laser seed (microhole) and (e) concave microlens integrated on a microcantilever; magnified images are shown in the insets.^[30]