Characterization of ion irradiated silicon surfaces ablated by laser-induced breakdown spectroscopy

Iqbal T^{1, ‡}, Abrar M^{2, §}, Tahir M B¹, Seemab M¹, Majid A¹, Rafique S³

(color online) Optical micrographs of (a) pristine N-type Si, (b) Al ions irradiated, (c) Ti ions irradiated, (d) Cu ions irradiated, and (e) Au ions irradiated n type Si.