Similarity principle of microwave argon plasma at low pressure<xref rid="cpb_27_8_085206fn1" ref-type="fn">*</xref><fn id="cpb_27_8_085206fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant No. 61331002), the National Key Basic Research Program of China (Grant No. 2013CB328903), and the Fundamental Research Funds for the Central Universities, China (Grant No. W15JB00510).</p></fn>

Similarity principle of microwave argon plasma at low pressure**

Project supported by the National Natural Science Foundation of China (Grant No. 61331002), the National Key Basic Research Program of China (Grant No. 2013CB328903), and the Fundamental Research Funds for the Central Universities, China (Grant No. W15JB00510).

Han Xiao-Yu, Wang Jun-Hong^†, Chen Mei-E, Zhang Zhan, Li Zheng, Li Yu-Jian

Diagram of HPM system for argon breakdown.