Synthesis of thermally stable HfOxNy as gate dielectric for AlGaN/GaN heterostructure field-effect transistors Project supported by the National Key Research and Development Program of China (Grant No. 2017YFB0403000). |
(color online) (a) The output characteristic of the HfO2 MOS HFETs before and after annealing, and (b) the gate leakage annealed at different temperatures. |