Dependence of single event upsets sensitivity of low energy proton on test factors in 65 nm SRAM Project supported by the Major Program of the National Natural Science Foundation of China (Grant Nos. 11690040 and 11690043). |
(color online) Proton LET as a function of penetration depth after protons penetrating through Al foils of different thicknesses and DUT multiple metallization layers with the initial proton energy of 1.2 MeV. |