Enhancement of off-state characteristics in junctionless field effect transistor using a field plate Project supported by the National Natural Science Foundation of China (Grant No. 61704130), the Fundamental Research Funds for the Central Universities, China (Grant No. 20101166085) and the Opening Project of Key Laboratory of Microelectronic Devices & Integrated Technology from Institute of Microelectronics, Chinese Academy of Sciences (Grant No. 90109162905). |
Cross sections of (a) conventional MOSFET, (b) normal JLFET, and (c) FP JLFET. |