Improved performance of Au nanocrystal nonvolatile memory by N2-plasma treatment on HfO2 blocking layer*

Project supported by the High Level Talent Project of Xiamen University of Technology, China (Grant Nos. YKJ16012R and YKJ16016R) and the National Natural Science Foundation of China (Grant No. 51702271).

Wang Chen1, †, Xu Yi-Hong2, Chen Song-Yan3, Li Cheng3, Wang Jian-Yuan3, Huang Wei3, Lai Hong-Kai3, Guo Rong-Rong1
       

(color online) Retention characteristics of memory capacitors with and without N2-plasma at room temperature.