Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O<sub>2</sub>

Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O₂

Han Dao-Man¹, Liu Yong-Xin^{1, 2, †}, Gao Fei¹, Liu Wen-Yao³, Xu Jun¹, Wang You-Nian¹

(color online) Variations of (a) 1s₅, (b) 1s₃, and (c) electron densities with oxygen content in DF driven discharges at three different gas pressures (6.7 Pa, 13 Pa, and 20 Pa). Values of P_H and P_L are fixed at 100 W and 50 W, respectively.