Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O2 |
(color online) Variations of (a) 1s5, (b) 1s3, and (c) electron densities with LF power PL in DF discharges with different gas components (0%, 5%, and 10% oxygen mixed in argon). Value of PH is fixed at 50 W and working pressure is fixed at 13 Pa. |