Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O2 |
(color online) Comparison among variations of (a) 1s5 and (b) 1s3, (c) electron densities, and (d) electron temperature with PH in SF and DF discharges operated in pure argon. Note the data in panels (a)–(c) are exactly the same as those in Figs. |