Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O2 |
(color online) Variations of (a) 1s5, (b) 1s3, and (c) electron densities with PH in DF driven discharge with different gas components (0%, 5%, 10% oxygen mixed in argon). LF power PL and working pressure are fixed at 50 W and 13 Pa, respectively. Note that arrows in panels (a) and (b) roughly indicate the saturation points of the metastable state densities. |