Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O2
Han Dao-Man1, Liu Yong-Xin1, 2, †, Gao Fei1, Liu Wen-Yao3, Xu Jun1, Wang You-Nian1
       

(color online) Variations of (a) 1s5, (b) 1s3, and (c) electron densities with HF power PH in SF driven discharge with different gas components (0%, 5%, and 10% oxygen mixed in argon). Pressure is fixed at 13 Pa. Note that arrows in panels (a) and (b) roughly indicate the saturation points of the metastable densities.