Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O<sub>2</sub>

Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O₂

Han Dao-Man¹, Liu Yong-Xin^{1, 2, †}, Gao Fei¹, Liu Wen-Yao³, Xu Jun¹, Wang You-Nian¹

(color online) Schematic of the DF capacitively coupled plasma reactor equipped with the tunable diode laser absorption spectroscopy (TDLAS) diagnostic system.