Superconducting membrane mechanical oscillator based on vacuum-gap capacitor*

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.

Li Yong-Chao1, 2, Dai Xin1, 2, ‡, Jiang Jun-Liang1, 2, Pan Jia-Zheng1, 2, Wei Xing-Yu1, 2, Lu Ya-Peng1, 2, Lu Sheng1, 2, Tu Xue-Cou1, 2, Sun Guo-Zhu1, 2, †, Wu Pei-Heng1, 2
       

(color online) Simulated relationship between pretension and fundamental frequency of the membrane mechanical resonator.