Superconducting membrane mechanical oscillator based on vacuum-gap capacitor<xref rid="cpb_27_6_060701_fn1" ref-type="fn">*</xref><fn id="cpb_27_6_060701_fn1"> <label>*</label> <p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.</p> </fn>

Superconducting membrane mechanical oscillator based on vacuum-gap capacitor* *

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.

Li Yong-Chao^{1, 2}, Dai Xin^{1, 2, ‡}, Jiang Jun-Liang^{1, 2}, Pan Jia-Zheng^{1, 2}, Wei Xing-Yu^{1, 2}, Lu Ya-Peng^{1, 2}, Lu Sheng^{1, 2}, Tu Xue-Cou^{1, 2}, Sun Guo-Zhu^{1, 2, †}, Wu Pei-Heng^{1, 2}

(color online) (a) Spectrum measured at different input microwave powers. When the input power is −19 dBm, there is only one peak (lower). When the input power increases to −18 dBm, four sideband frequencies appear (upper). (b) Positions of peaks versus the nominal input microwave power.