Superconducting membrane mechanical oscillator based on vacuum-gap capacitor<xref rid="cpb_27_6_060701_fn1" ref-type="fn">*</xref><fn id="cpb_27_6_060701_fn1"> <label>*</label> <p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.</p> </fn>

Superconducting membrane mechanical oscillator based on vacuum-gap capacitor* *

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.

Li Yong-Chao^{1, 2}, Dai Xin^{1, 2, ‡}, Jiang Jun-Liang^{1, 2}, Pan Jia-Zheng^{1, 2}, Wei Xing-Yu^{1, 2}, Lu Ya-Peng^{1, 2}, Lu Sheng^{1, 2}, Tu Xue-Cou^{1, 2}, Sun Guo-Zhu^{1, 2, †}, Wu Pei-Heng^{1, 2}

(color online) Plot of measured S₂₁ versus frequency of the transmission line, where a resonance dip is due to the coupling of the superconducting microwave resonant circuit to the transmission line. The resonant frequency and quality factor are 5.788 GHz and 7542, respectively.