Superconducting membrane mechanical oscillator based on vacuum-gap capacitor<xref rid="cpb_27_6_060701_fn1" ref-type="fn">*</xref><fn id="cpb_27_6_060701_fn1"> <label>*</label> <p>Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.</p> </fn>

Superconducting membrane mechanical oscillator based on vacuum-gap capacitor* *

Project supported by the National Key Research and Development Program of China (Grant No. 2016YFA0301801), the National Natural Science Foundation of China (Grant Nos. 11474154 and 61521001), and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University, China.

Li Yong-Chao^{1, 2}, Dai Xin^{1, 2, ‡}, Jiang Jun-Liang^{1, 2}, Pan Jia-Zheng^{1, 2}, Wei Xing-Yu^{1, 2}, Lu Ya-Peng^{1, 2}, Lu Sheng^{1, 2}, Tu Xue-Cou^{1, 2}, Sun Guo-Zhu^{1, 2, †}, Wu Pei-Heng^{1, 2}

(color online) (a) Optical photograph of LC resonator coupled to a coplanar waveguide transmission line. The upper and lower insets show SEM images of the corner part of VGC and the overlapping part of the inductor and the lower electrode of VGC, respectively. (b) Fabrication procedure for VGC. Top view and cross-sectional view along the dashed line in the top view are presented, respectively.