Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO2 films
Zhang Yu1, Xu Jun1, †, Zhou Da-Yu2, Wang Hang-Hang1, Lu Wen-Qi1, Choi Chi-Kyu3
       

(color online) XPS depth profiles for the Y-doped HfO2 films of (a) Hf 4f, (b) O 1s, and (c) Y 3d core-level spectrum with seven stripping depths.