Off-stoichiometry indexation of BiFeO3 thin film on silicon by Rutherford backscattering spectrometry
Wang Ze-Song1, †, Xiao Ren-Zheng2, Zou Chang-Wei1, Xie Wei1, Tian Can-Xin1, Xue Shu-Wen1, Liu Gui-Ang1, Devi Neena3, Fu De-Jun3
       

(color online) (a) Flow diagram of details of preparing BiFeO3 thin films, and (b) schematic diagram of detection geometry in the target chamber for ion beam analysis.