Low specific on-resistance GaN-based vertical heterostructure field effect transistors with nonuniform doping superjunctions
Mao Wei1, Wang Hai-Yong1, Shi Peng-Hao1, Wang Xiao-Fei2, †, Du Ming1, Zheng Xue-Feng1, Wang Chong1, Ma Xiao-Hua1, Zhang Jin-Cheng1, Hao Yue1
       

(color online) Plots of breakdown voltage and specific on-resistance versus H2 at different values of N 1 for a given N step in non-SJ HFET.