Low specific on-resistance GaN-based vertical heterostructure field effect transistors with nonuniform doping superjunctions |
(color online) Schematic structures for (a) non-SJ HFET and (b) un-SJ HFET. Lines A1A2 or B1B2 denote the vertical direction at the n-pillar/p-pillar junction or the middle of the device, respectively. |