(color online) Schematic illustration of the ALD mechanism for the growth process of (a) ZnO–W and (b) ZnO–O. All films were grown on a glass substrate, first, cycle temperature-dependent thermoelectric properties of ZnO–O and ZnO–W. (c) Electrical conductivity and (d) Seebeck coefficient. Drastically different properties of ZnO films are observed depending on the oxidant used (water versus ozone) during ZnO growth. Heating cycle and subsequent cooling cycle are presented with filled and open symbols, respectively.^[55]