Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas

Xue Chan¹, Gao Fei^{1, †}, Liu Yong-Xin¹, Liu Jia², Wang You-Nian^{1, ‡}

(color online) Dependence of the IED on the phase shift under different bias voltages: (a1) 150 V, (a2) 200 V, and (a3) 250 V with source power of 100 W and pressure of 10 mTorr. Dependence of the IED on the phase shift at different source powers: (b1) 100 W, (b2) 200 W, and (b3) 300 W with a fixed bias voltage of 200 V and a fixed pressure of 10 mTorr. Dependence of the IED on the phase shift at different pressures at 10 mTorr, (c2) 30 mTorr, and (c3) 50 mTorr with a fixed bias voltage of 200 V and a fixed source power of 100 W.