Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas

Xue Chan¹, Gao Fei^{1, †}, Liu Yong-Xin¹, Liu Jia², Wang You-Nian^{1, ‡}

(color online) Evolutions of time-averaged IED with phase shift in (a) CW discharge and (b) synchronous pulse modulated ICP. Source power is 200 W, bias voltage is 200 V, and discharge pressure is 10 mTorr. Pulse repetition frequency is 1 kHz and its duty cycle is 50%.