Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas

Xue Chan¹, Gao Fei^{1, †}, Liu Yong-Xin¹, Liu Jia², Wang You-Nian^{1, ‡}

(color online) Normalized IED evolutions with phase shift at different bias voltages: (a1) 150 V, (a2) 200 V, and (a3) 250 V, when the source power is 100 W and the pressure is 10 mTorr, at different source powers (b1) 100 W, (b2) 200 W, and (b3) 300 W, when the bias voltage is 200 V and discharge pressure is 10 mTorr, and at different pressures: (c1) 10 mTorr, (c2) 30 mTorr, and (c3) 50 mTorr, when applied bias voltage is 200 V and source power is 100 W.