Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas

Xue Chan¹, Gao Fei^{1, †}, Liu Yong-Xin¹, Liu Jia², Wang You-Nian^{1, ‡}

(color online) Dependence of the normalized IED on phase shift θ for the cases of θ = 0, π/2, and π at bias voltages of 200 V, pressure of 10 mTorr, and source power of 200 W.