Numerical study on discharge characteristics influenced by secondary electron emission in capacitive RF argon glow discharges by fluid modeling
Zhao Lu-Lu1, 2, Liu Yue1, †, Samir Tagra1
       

(color online) Cycle-averaged spatial distributions of (a) electron pressure heating, (b) electron Ohmic heating, (c) electron heating, and (d) ion heating, with the SEE coefficients of 0.01, 0.1, 0.2, and 0.3 in the 5000th cycle, respectively.