Numerical study on discharge characteristics influenced by secondary electron emission in capacitive RF argon glow discharges by fluid modeling
Zhao Lu-Lu1, 2, Liu Yue1, †, Samir Tagra1
       

(color online) Cycle-averaged (a) electric field, (b) electron temperature, (c) ionization rate, and (d) electron density, with SEE coefficient of 0.01, 0.1, 0.2, and 0.3 at three positions: in the powered sheath at x = 0.02 cm, in the center of discharge at x = 1.25 cm, and in the grounded sheath at x = 2.48 cm in the 5000th cycle.